JPH0241361U - - Google Patents

Info

Publication number
JPH0241361U
JPH0241361U JP11917888U JP11917888U JPH0241361U JP H0241361 U JPH0241361 U JP H0241361U JP 11917888 U JP11917888 U JP 11917888U JP 11917888 U JP11917888 U JP 11917888U JP H0241361 U JPH0241361 U JP H0241361U
Authority
JP
Japan
Prior art keywords
electron beam
transport
path
conveyance path
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11917888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0743680Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11917888U priority Critical patent/JPH0743680Y2/ja
Publication of JPH0241361U publication Critical patent/JPH0241361U/ja
Application granted granted Critical
Publication of JPH0743680Y2 publication Critical patent/JPH0743680Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP11917888U 1988-09-10 1988-09-10 電子線照射装置 Expired - Lifetime JPH0743680Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11917888U JPH0743680Y2 (ja) 1988-09-10 1988-09-10 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11917888U JPH0743680Y2 (ja) 1988-09-10 1988-09-10 電子線照射装置

Publications (2)

Publication Number Publication Date
JPH0241361U true JPH0241361U (en]) 1990-03-22
JPH0743680Y2 JPH0743680Y2 (ja) 1995-10-09

Family

ID=31364188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11917888U Expired - Lifetime JPH0743680Y2 (ja) 1988-09-10 1988-09-10 電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0743680Y2 (en])

Also Published As

Publication number Publication date
JPH0743680Y2 (ja) 1995-10-09

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